LITHOBOLT™

Die-to-wafer hybrid bonding is a pivotal process for enabling the redesign of system-on-chip (SoC) devices to 3D stacked chips via chiplet technology—combining chips with different process nodes into advanced packaging systems that can power new applications such as 5G, high performance computing (HPC) and artificial intelligence (AI). ASMPT's next evolution of IC interconnect solutions — LITHOBOLT™ — Hybrid bonder for Die-to-Wafer hybrid bonding, will complement our total interconnect solutions for heterogeneous integration.

Classification: Hybrid Bonding

Product Description
Bottom details

Features

Tool design compatible with front end process
Design for Chiplet integration
Flexible process capability for D2W hybrid bonding
关键词:
- 半导体
- 欧姆接触
- 过渡金属