CM-AQUA (deionized water cleaning)

The CM-AQUA is a fully automatic DI-water cleaning system for CMOS image sensor. Its high-speed system is equipped with pressurized DI-water cleaning and centrifugal drying system to remove foreign particles that are larger than 1µm on the substrates. The CM-AQUA is complete with in-line capabilities.

Classification: Cleaning

Product Description
Bottom details

Automatic DI-Water Cleaning System

Dimensions

W x D x H (w/o I/O elevators)
1,445 x 1,728 x 2,248 mm

Features

Highly efficient DI-water cleaning
Efficient cleaning design
Cleaning capability down to 1 µm particle size
Handle up to 8 substrates at one time
High speed centrifugal drying
Spinning at a high speed with max. 1,200 rpm
Ultra clean inner environment achieved
Automatic operation
In-line capability
关键词:
- 半导体
- 欧姆接触
- 过渡金属