Products and Services
Products and Services

Wafer Sputtering – Apollo 300

PVD 200-300 mm Wafer Processing

Classification: Deposition Solutions

  • Product Description
  • Bottom details
  • Applications
    Configurable for up to 5 metals
    UBM/RDL
    Fan Out
    RF Filters
    Power Devices
    Features
    True Bridge tool capability: Size Change
    Degas/Anneal
    ICP/CCP Etch
    Substrates
    200 and 300 mm wafers
    Warped and heavy wafer processing
    Silicon, EMC, RCP, Glass, Bonded
    Other Products
    Apollo 200

    关键词:
    • 半导体
    • 欧姆接触
    • 过渡金属
Wafer Sputtering – Apollo 300
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  • Wafer Sputtering – Apollo 300

Keywords: chip frame processing capability system

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